All-reliable-point out ultraviolet lasers have been extensively Utilized in the fields of mechanical flaw detection, lithography, micromachining and medicine for the benefits of compact volume, very long everyday living, superior effectiveness, very good beam top quality, broad tuning and slender spectral line, etc. Employing significant electricity in close proximity to-infrared coherent light-weight supply as the fundamental frequency resource dependant on nonlinear tuning technology, producing ultraviolet coherent radiation by multistage frequency conversion is considered to be a crucial technique to build the ultraviolet coherent mild source.
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We summarized The present progress status of your superior-energy DUV laser each in the wavelength of FHG of the one-μm laser and at 193 nm. The modern progress in the solid-point out/fiber laser, in addition to the nonlinear optical crystals, prompts don't just the common energy and also the beam high quality (coherence) in the DUV lasers to an unparalleled level.
全固态紫外激光器以其体积小、寿命长、效率高、光束质量好、调谐范围宽、谱线窄等优点，广泛应用于机械探伤、光刻、微加工和医学等领域，等，利用大功率近红外相干光源作为基于非线性调谐技术的基频源，通过多级变频产生紫外相干辐射被认为是发展紫外相干光源的重要途径。紫外相干光源的关键问题是研制紫外波段的非线性光学变频晶体。非线性光学晶体是实现频率变换的条件之一，因此对非线性光学晶体的生长、尺寸、损伤电阻、转换效率和允许的参数范围提出了越来越高的要求。
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Due to thermal lens result within the good-condition lasers, When the heating administration is insufficient, It's not necessarily simple to get the stable-state laser using a superior electrical power and a significant beam top quality at the same time. Just lately, with the event of the thin disk laser and solitary-crystal fiber (SCF) laser, a large-ability laser at the fundamental wavelength (1 μm) had been recognized with a fantastic beam quality even with a TEM00 mode beam [4,24], which would be great candidates for the elemental of the DUV laser technology. Another prospect for the fundamental may be the substantial-electric power fiber laser which can be achieved by coherent beam combination with M2 value less than one.
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Inside the scientific and industrial programs, the beam top quality of the DUV laser is likewise a very important parameter. Particularly, the beam quality of your DUV laser radically influences the laser machining success. The beam excellent on the DUV laser is determined by that of the elemental laser plus the crystal to the frequency conversion. Lately, a high-electrical power DUV laser (>ten W) at 258 nm was noted that has a beam high quality of M2 < 1.five, which was created by FHG get more info of a Yb:YAG laser at 1030 nm using the CLBO crystal [thirteen]. This laser would bring about an improved laser machining outcome as compared to the earlier DUV lasers with more substantial M2.
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Also, combining the sound-point out laser with other nonlinear method including stimulated Raman scattering, NIR lasers may be reached at new wavelengths with superior power and higher beam good quality, which was examined because of the evidence-of-theory experiment. This Raman laser scheme provides a new path to the significant-electricity DUV laser, Specially within the wavelength of 193 nm.
The beam profile revealed in Determine 7b shown a fantastic beam high-quality as among the merits of Raman laser, which might be effective to deliver a 193-nm DUV laser with a top quality beam.
The conversion performance from basic NIR to DUV is from five% to 36% according to the noted brings about Table one. Escalating the conversion performance will decrease the stress on the design and set up of the fundamental laser amplifier and also the electric ability usage. A very good beam top quality of the elemental laser may also lead into the escalating on the conversion efficiency and also the suitable ability depth of the NIR and eco-friendly laser within the SHG and FHG method, respectively. The very best conversion efficiencies from NIR to eco-friendly and eco-friendly to DUV laser by usage of CLBO crystal are 70% and all over fifty%, respectively [12], which corresponds for the conversion efficiency of 35% from essential to DUV.
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